Optical knife-edge displacement sensor for high-speed atomic force microscopy

被引：17

作者：

Braunsmann, Christoph ^{[1
,2
]}

Prucker, Veronika ^{[3
]}

Schaeffer, Tilman E. ^{[1
,2
]}

机构：

[1] Univ Tubingen, Inst Appl Phys, D-72076 Tubingen, Germany

[2] Univ Tubingen, LISA, D-72076 Tubingen, Germany

[3] Univ Erlangen Nurnberg, Inst Appl Phys, D-91058 Erlangen, Germany

来源：

APPLIED PHYSICS LETTERS | 2014年 / 104卷 / 10期

关键词：

SMALL CANTILEVERS; SPECTROSCOPY; HEIGHT; DESIGN;

D O I：

10.1063/1.4868043

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We show that an optical knife-edge technique can be used to detect the parallel shift of an object with sub-nanometer resolution over a wide bandwidth. This allows to design simple, contact-free, and high-speed displacement sensors that can be implemented in high-speed atomic force microscope scanners. In an experimental setup, we achieved a root-mean-square sensor noise of 0.8 nm within a bandwidth from 1Hz to 1.1 MHz. We used this sensor to detect and correct the nonlinear z-piezo displacement during force curves acquired with rates of up to 5 kHz. We discuss the fundamental resolution limit and the linearity of the sensor. (C) 2014 AIP Publishing LLC.

引用

页数：4

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