Edge effect modeling and experiments on active lap processing

被引：24

作者：

Liu, Haitao ^{[1
,2
]}

Wu, Fan ^{[2
]}

Zeng, Zhige ^{[2
]}

Fan, Bin ^{[2
]}

Wan, Yongjian ^{[2
]}

机构：

[1] Chinese Acad Sci, Inst Opt & Elect, Chengdu 610209, Peoples R China

[2] Univ Chinese Acad Sci, Beijing 100039, Peoples R China

来源：

OPTICS EXPRESS | 2014年 / 22卷 / 09期

基金：

中国国家自然科学基金;

关键词：

TOOL INFLUENCE FUNCTIONS; PRESTON EQUATION;

D O I：

10.1364/OE.22.010761

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Edge effect is regarded as one of the most difficult technical issues for fabricating large primary mirrors, especially for large polishing tools. Computer controlled active lap (CCAL) uses a large size pad (e.g., 1/3 to 1/5 workpiece diameters) to grind and polish the primary mirror. Edge effect also exists in the CCAL process in our previous fabrication. In this paper the material removal rules when edge effects happen (i.e. edge tool influence functions (TIFs)) are obtained through experiments, which are carried out on a Phi 1090-mm circular flat mirror with a 375-mm-diameter lap. Two methods are proposed to model the edge TIFs for CCAL. One is adopting the pressure distribution which is calculated based on the finite element analysis method. The other is building up a parametric equivalent pressure model to fit the removed material curve directly. Experimental results show that these two methods both effectively model the edge TIF of CCAL. (C) 2014 Optical Society of America

引用

页码：10761 / 10774

页数：14

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