Texture evolution of electroplated copper under various modes of convection. Effect of dissolved oxygen

被引：14

作者：

Fricoteaux, P ^{[1
]}

Douglade, J ^{[1
]}

机构：

[1] Univ Reims, DTI, CNRS, UMR 6107, F-51687 Reims 02, France

来源：

JOURNAL OF MATERIALS SCIENCE LETTERS | 2002年 / 21卷 / 19期

关键词：

D O I：

10.1023/A:1020079911268

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A comparative study of the copper texture between the magnetic field and the rotating electrode was performed. Furthermore, the influence of dissolved oxygen on the texture coefficient was examined. It was shown that the texture of the copper deposit is significantly modified when electrolysis is carried out with a weak polarization in the presence of a magnetic field or with a rotating electrode. The magnetic field effect was the same as that produced by a rotating electrode.

引用

页码：1485 / 1488

页数：4

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