Material Analysis of Ruthenium-Doped Titanium Dioxide Sensing Film and Applied as Calcium Ion Sensor

被引：5
作者：
Chou, Jung-Chuan [1 ,2 ]
Chen, Cheng-Wei [2 ]
机构：
[1] Natl Yunlin Univ Sci & Technol, Grad Sch Optoelect, Touliu 64002, Taiwan
[2] Natl Yunlin Univ Sci & Technol, Grad Sch Engn Sci & Technol, Touliu 64002, Taiwan
来源：
SENSOR LETTERS | 2008年 / 6卷 / 06期
关键词：
Ruthenium-Doped Titanium Dioxide; Co-Sputtering System; Extended Gate Field Effect Transistor (EGFET); Calcium Ion Sensor;
D O I：
10.1166/sl.2008.545
中图分类号：
O65 [分析化学];
学科分类号：
070302 ; 081704 ;
摘要：
In this investigation, we utilize co-sputtering system to prepare ruthenium-doped titanium dioxide (TiO2:Ru) sensing film. Co-sputtering system consists of radio frequency (R.F.) and direct current (D.C.) power generators. TiO2:Ru sensing film is deposited on p-type silicon substrate. TiO2:Ru sensing film is based on gate of extended gate field effect transistor (EGFET). Sensitivity and linearity of TiO2:Ru sensing device were measured between pH1 and pH13 by current-voltage (I-V) measurement system (Keithley 236), which are 55.20 mV/pH and 0.999, respectively. In order to understand material characteristics of TiO2:Ru sensing film, we used field emission scanning electron microscopy (FE-SEM) to observe surface morphology of TiO2:Ru sensing film that is nanoscale cubic structure. The cubic size is nanoscale between 37 nm and 43 nm. Furthermore, we also used atomic force microscopy (AFM) and X-ray diffraction (XRD) to observe surface roughness and crystalline phase, respectively. According to the measured results, TiO2:Ru sensing film has superior sensing characteristics, thus it can be applied to other sensors such as ion sensors and biosensors. In this study, the calcium ion selective membrane is based on surface of TiO2:Ru sensing film. The calcium ion sensor is utilized to measure ion concentrations, which was immersed into sample liquids of CaCl2 between 1 M and 1 X 10(-3) M. Sensitivity and linearity of calcium ion sensor are 29.65 mV/pH and 0.999, respectively.
引用
收藏
页码：983 / 986
页数：4
相关论文
共 12 条
[1]  
ATASHBAR MZ, 2001, P 2001 1 IEEE C NAN, V544
[2]   DEVELOPMENT OF AN ION-SENSITIVE SOLID-STATE DEVICE FOR NEUROPHYSIOLOGICAL MEASUREMENTS [J].
BERGVELD, P .
IEEE TRANSACTIONS ON BIOMEDICAL ENGINEERING, 1970, BM17 (01) :70-&
[3]   Ion-selective field effect transistor (ISFET)-based calcium ion sensor with photocured polyurethane membrane suitable for ionised calcium determination in milk [J].
Bratov, A ;
Abramova, N ;
Domínguez, C ;
Baldi, A .
ANALYTICA CHIMICA ACTA, 2000, 408 (1-2) :57-64
[4]   FIELD-EFFECT TRANSISTOR SENSITIVE TO PENICILLIN [J].
CARAS, S ;
JANATA, J .
ANALYTICAL CHEMISTRY, 1980, 52 (12) :1935-1937
[5]   Translucent thin film Fe2O3 photoanodes for efficient water splitting by sunlight:: Nanostructure-directing effect of Si-doping [J].
Cesar, I ;
Kay, A ;
Martinez, JAG ;
Grätzel, M .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2006, 128 (14) :4582-4583
[6]   The preparation of nitrogen-doped photocatalyst TiO2-xNx by ball milling [J].
Chen, SF ;
Chen, L ;
Gao, S ;
Cao, GY .
CHEMICAL PHYSICS LETTERS, 2005, 413 (4-6) :404-409
[7]   Study on pH at the point of zero charge of TiO2 pH ion-sensitive field effect transistor made by the sputtering method [J].
Chou, JC ;
Liao, LP .
THIN SOLID FILMS, 2005, 476 (01) :157-161
[8]   Study of TiO2 thin films for ion sensitive field effect transistor application with RF sputtering deposition [J].
Chou, JC ;
Liao, LP .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS, 2004, 43 (01) :61-65
[9]   Synergy effect in the photocatalytic degradation of phenol on a suspended mixture of titania and activated carbon [J].
Matos, J ;
Laine, J ;
Herrmann, JM .
APPLIED CATALYSIS B-ENVIRONMENTAL, 1998, 18 (3-4) :281-291
[10]  
PODARU C, 1998, P IEEE SEM C, V565
12