Synthesis of highly crystalline multiwalled carbon nanotubes by thermal chemical vapor deposition using buffer gases

被引:6
作者
Han, IT
Kim, HJ
Park, YJ
Jin, YW
Jung, JE
Kim, JM
Kim, BK
Lee, N
Kim, SK
机构
[1] Samsung Adv Inst Technol, FED Project Team, Suwon 440600, South Korea
[2] Sejong Univ, Dept Nano Sci & Technol, Seoul 143747, South Korea
[3] Sejong Univ, Adv Inst Nanotechnol, Seoul 143747, South Korea
[4] Seoul Natl Univ, Sch Chem, Seoul 151747, South Korea
来源
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS BRIEF COMMUNICATIONS & REVIEW PAPERS | 2004年 / 43卷 / 6A期
关键词
carbon nanotube; thermal chemical vapor deposition; buffer gas; crystallinity;
D O I
10.1143/JJAP.43.3631
中图分类号
O59 [应用物理学];
学科分类号
摘要
Multiwalled carbon nanotubes were formed on Fe-Ni-Co alloy-coated glass substrates by infrared-radiation-heated thermal chemical vapor deposition using CO and H-2 gases at temperatures as low as 480-580degreesC. Growth of the carbon nanotubes was strongly affected by Ar or N-2 gas introduced during the heat-up stage prior to the growth, which markedly increased the growth rate of carbon nanotubes by an order of magnitude and yielded the carbon nanotubes with better crystallinity and less amount of carbonaceous impurity particles, in comparison with those grown at the same condition but heated in vacuum to the growth temperature. It is proposed that gas-phase energy transfer enhances the synthesis of highly crystalline carbon nanotubes while suppressing the formation of carbonaceous impurity particles.
引用
收藏
页码:3631 / 3635
页数:5
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