共 24 条
- [2] A frequency domain method for the measurement of nonlinearity in heterodyne interferometry [J]. PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 2000, 24 (01): : 41 - 49
- [3] Combined optical and X-ray interferometry for high-precision dimensional metrology [J]. PROCEEDINGS OF THE ROYAL SOCIETY A-MATHEMATICAL PHYSICAL AND ENGINEERING SCIENCES, 2000, 456 (1995): : 701 - 729
- [4] BONG ET, 2002, MEAS SCI TECHNOL, V13, P222
- [5] COSIJNS S, 2002, P 3 EUSPEN C, V2, P593
- [7] DeFreitas JM, 1997, MEAS SCI TECHNOL, V8, P1356, DOI 10.1088/0957-0233/8/11/023
- [8] *EMRP, T3J14 EMRP
- [9] Flügge J, 2005, NANOSCALE CALIBRATION STANDARDS AND METHODS: DIMENSIONAL AND RELATED MEASUREMENTS IN THE MICRO- AND NANOMETER RANGE, P404, DOI 10.1002/3527606661.ch30
- [10] Improving a commercially available heterodyne laser interferometer to sub-nm uncertainty [J]. RECENT DEVELOPMENTS IN TRACEABLE DIMENSIONAL MEASUREMENTS II, 2003, 5190 : 347 - 354