A homodyne Michelson interferometer with sub-picometer resolution

被引:52
作者
Pisani, Marco
机构
[1] Istituto Nazionale di Ricerca Metrologica, INRiM
关键词
interferometry; nanometrology; HETERODYNE LASER INTERFEROMETER; X-RAY INTERFEROMETRY; MICRODISPLACEMENT ACTUATORS; NONLINEARITY; CALIBRATION;
D O I
10.1088/0957-0233/20/8/084008
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
A homodyne interferometer which exploits a multiple reflection arrangement between two quasi parallel mirrors to deliver a multiplication factor is presented. The relative displacement of the two mirrors causes a more than 100-fold increment of the optical path, which is measured by the optoelectronic circuitry. This leads to a proportional reduction of the errors associated with the subdivision of the optical fringes, with the effect of fringe nonlinearities, and with the opto-electronic noise. In particular the reduction of the electronic noise limit to the level of 20 fm Hz(-1/2) has been demonstrated. The exact formula of the gain has been calculated and confirmed experimentally.
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页数:6
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