Mapping Sub-Surface Structure of Thin Films in Three Dimensions with an Optical Near-Field

被引：2

作者：

Fenwick, Oliver ^{[1
]}

Mauthoor, Soumaya ^{[2
,3
]}

Cacialli, Franco ^{[2
,3
]}

机构：

[1] Queen Mary Univ London, Sch Engn & Mat Sci, London WC1E 6BT, England

[2] UCL, Dept Phys & Astron, Gower St, London WC1E 6BT, England

[3] UCL, London Ctr Nanotechnol, Gower St, London WC1E 6BT, England

来源：

ADVANCED THEORY AND SIMULATIONS | 2019年 / 2卷 / 06期

基金：

英国工程与自然科学研究理事会;

关键词：

microscopy; near-field; NSOM; SNOM; sub-surface; PHOTOCURRENT; LITHOGRAPHY; DIFFRACTION; MICROSCOPY; RESOLUTION; SNOM; ELLIPSOMETRY; SPECTROSCOPY; TOMOGRAPHY; ARTIFACTS;

D O I：

10.1002/adts.201900033

中图分类号：

O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];

学科分类号：

07 ; 0710 ; 09 ;

摘要：

Subsurface mapping is crucial to understanding many biological systems as well as structured thin films for (opto)electronic or photonic applications. A non-invasive method is presented to map subsurface nanostructures from scanning near-field optical microscopy images. The Bethe-Bouwkamp model is used to simulate imaging of buried nano-objects or subsurface slanted planar interfaces, and it is shown how to determine their depth and size, or the interface inclination, from just one image. It is shown that the steep optical field gradient makes near-field microscopy a particularly sensitive depth probe for thin films.

引用

页数：6

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