A new model of the effect of mechanical stress on the saturation current of bipolar transistors

被引:17
作者
Creemer, JF [1 ]
French, PJ [1 ]
机构
[1] Delft Univ Technol, DIMES, NL-2628 CD Delft, Netherlands
关键词
piezojunction effect; bipolar transistor; piezoresistance; stress effects; strain gauges; minority carriers;
D O I
10.1016/S0924-4247(01)00854-8
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The saturation current of bipolar transistors is modified by mechanical stress through the piezojunction effect. This effect can be used in mechanical sensors, but is unwanted in electronic circuits stressed by packaging. A new model of the effect has been developed which is practical in sensor and circuit design. It is similar to the widespread model of the piezoresistive effect, and also consists of a polynomial series with the symmetry of the silicon crystal. The model has been verified experimentally by characterising transistors under bending stress, which also yielded values for many of the model coefficients. The set of first-order coefficients is completed by using the sensitivity to hydrostatic pressure. The piezojunction effect can be explained by changes in both the valence and the conduction bands, whereas the piezoresistive effect is determined by only one band, depending on the doping type. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:289 / 295
页数:7
相关论文
共 41 条
[1]  
Bittle D. A., 1991, Transactions of the ASME. Journal of Electronic Packaging, V113, P203, DOI 10.1115/1.2905397
[2]  
BULTHUIS K, 1965, PHILIPS RES REP, V20, P415
[3]   The piezojunction effect in bipolar transistors at moderate stress levels: a theoretical and experimental study [J].
Creemer, JF ;
French, PJ .
SENSORS AND ACTUATORS A-PHYSICAL, 2000, 82 (1-3) :181-185
[4]  
CREEMER JF, 2000, P 30 EUR SOL STAT DE, P416, DOI DOI 10.1109/ESSDERC.2000.194803
[6]   STRAIN EFFECTS ON DEVICE CHARACTERISTICS - IMPLEMENTATION IN DRIFT-DIFFUSION SIMULATORS [J].
EGLEY, JL ;
CHIDAMBARRAO, D .
SOLID-STATE ELECTRONICS, 1993, 36 (12) :1653-1664
[7]  
Friedrich A. P., 1999, SERIES MICROSYSTEMS, V2
[8]   Measurement and compensation of piezoresistive coefficient π44 for minority-carrier concentration [J].
Fruett, F ;
Meijer, GCM .
ELECTRONICS LETTERS, 2000, 36 (02) :173-175
[9]   A new sensor structure using the piezojunction effect in PNP lateral transistors [J].
Fruett, F ;
Meijer, GCM .
SENSORS AND ACTUATORS A-PHYSICAL, 2001, 92 (1-3) :197-202
[10]  
FRUETT F, 1999, P 14 EUR C SOL STAT, P53