The effect of nitriding on the diamond film characteristics on chromium substrates

被引:9
作者
Buijnsters, JG
Shankar, P
van Enckevort, WJP
Schermer, JJ
ter Meulen, JJ
机构
[1] Catholic Univ Nijmegen, Mat Res Inst, Dept Appl Phys, NL-6525 ED Nijmegen, Netherlands
[2] Catholic Univ Nijmegen, Mat Res Inst, Dept Solid State Chem, NL-6525 ED Nijmegen, Netherlands
[3] Catholic Univ Nijmegen, Mat Res Inst, Dept Expt Solid State Phys 3, NL-6525 ED Nijmegen, Netherlands
关键词
chemical vapour deposition; diamond films; pretreated substrates; diffusion;
D O I
10.1016/S0925-9635(02)00158-9
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
In this report, we present a study of diamond deposition on pure and nitrided chromium substrates using the hot filament-assisted chemical vapour deposition technique. Deposition was performed at substrate temperatures varying from 475 to 750 degreesC for different exposure times. Scanning electron microscopy (SEM), micro-Raman spectroscopy and X-ray diffraction (XRD) techniques were employed to study the modified interlayers and diamond films. The high solubility and diffusivity of carbon in pure chromium result in an increased incubation time for diamond nucleation. However, even a 4-5-mum-thick nitrided layer is efficient as a diamond-nucleating surface, with a reduced incubation time as compared to pure chromium. Fully covering and adhering diamond films were obtained on the nitrided Cr specimens at temperatures between 550 and 750 degreesC. As a result of the nitriding process, the nitride diffusion layer reduces the carbon solubility at the substrate surface, thereby reducing the incubation time for diamond nucleation. Due to the strong chemical and mechanical bonding of the diamond films to the nitrided Cr substrates, the residual compressive stresses are accommodated, leading to adherent, continuous diamond films. The present study, however, also indicates an optimal low-temperature deposition condition to obtain a continuous diamond film directly on pure Cr. (C) 2002 Elsevier Science B.V. All rights reserved.
引用
收藏
页码:1760 / 1768
页数:9
相关论文
共 23 条
[1]   QUANTITATIVE MEASUREMENT OF RESIDUAL BIAXIAL STRESS BY RAMAN-SPECTROSCOPY IN DIAMOND GROWN ON A TI ALLOY BY CHEMICAL-VAPOR-DEPOSITION [J].
AGER, JW ;
DRORY, MD .
PHYSICAL REVIEW B, 1993, 48 (04) :2601-2607
[2]   THERMAL-PROPERTIES OF C/H-GROWN, C/H/O-GROWN, C/H/N-GROWN AND C/H/X-GROWN POLYCRYSTALLINE CVD DIAMOND [J].
BACHMANN, PK ;
HAGEMANN, HJ ;
LADE, H ;
LEERS, D ;
WIECHERT, DU ;
WILSON, H ;
FOURNIER, D ;
PLAMANN, K .
DIAMOND AND RELATED MATERIALS, 1995, 4 (5-6) :820-826
[3]   RAMAN AND PHOTOLUMINESCENCE ANALYSIS OF STRESS STATE AND IMPURITY DISTRIBUTION IN DIAMOND THIN-FILMS [J].
BERGMAN, L ;
NEMANICH, RJ .
JOURNAL OF APPLIED PHYSICS, 1995, 78 (11) :6709-6719
[4]   Influence of nitrided and carbonitrided interlayers on enhanced nucleation of diamond on stainless steel 304 [J].
Borges, CFM ;
Pfender, E ;
Heberlein, J .
DIAMOND AND RELATED MATERIALS, 2001, 10 (11) :1983-1990
[5]  
BORGES CFM, 1998, Patent No. 5759623
[6]   CVD diamond deposition on steel using arc-plated chromium nitride interlayers [J].
Buijnsters, JG ;
Shankar, P ;
Fleischer, W ;
van Enckevort, WJP ;
Schermer, JJ ;
ter Meulen, JJ .
DIAMOND AND RELATED MATERIALS, 2002, 11 (3-6) :536-544
[7]  
BUIJNSTERS JG, IN PRESS MAT SCI E A
[8]   Origin of the 1150-cm-1 Raman mode in nanocrystalline diamond -: art. no. 121405 [J].
Ferrari, AC ;
Robertson, J .
PHYSICAL REVIEW B, 2001, 63 (12)
[9]   Adhesion improvement of diamond films on steel substrates using chromium nitride interlayers [J].
Glozman, O ;
Hoffman, A .
DIAMOND AND RELATED MATERIALS, 1997, 6 (5-7) :796-801
[10]  
Goldschmidt H.J., 1967, Interstitial Alloys