Micromachined Hotplate Platform for the Investigation of Ink-Jet Printed, Functionalized Metal Oxide Nanoparticles

被引：34

作者：

Walden, Paul ^{[1
]}

Kneer, Janosch ^{[1
]}

Knobelspies, Stefan ^{[1
]}

Kronast, Wolfgang ^{[2
]}

Mescheder, Ulrich ^{[2
]}

Palzer, Stefan ^{[1
]}

机构：

[1] Univ Freiburg, Inst Microsyst Technol, Dept Microsyst Engn, Lab Gas Sensors, D-79085 Freiburg, Germany

[2] Furtwangen Univ, Fac Comp & Elect Engn, Inst Appl Res, D-78120 Furtwangen Im Schwarzwal, Germany

来源：

JOURNAL OF MICROELECTROMECHANICAL SYSTEMS | 2015年 / 24卷 / 05期

关键词：

Microelectromechanical devices; microsensors; nanotechnology; gas detectors; MICROHOTPLATE PLATFORMS; MICRO-HEATERS; TIN OXIDE; GAS; NANOSTRUCTURES; SENSORS;

D O I：

10.1109/JMEMS.2015.2399696

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This paper describes a novel micromachined platform serving as an interface between nanosized, gas sensitive metal oxide particles, and the macroscopic world. Through a combination of ink-jet printing and microelectromechanical systems technologies, it thus becomes possible to quickly test and characterize new nanosized metal oxide particles with respect to their gas sensitivity. Within the framework of this report, we describe the design considerations, thermal finite-element method simulations, processing, characterization, and utilization of the platform. Due to the low-power consumption, the hotplate provides an experimental platform to test nanoparticle-based metal oxide gas sensors for mobile systems. [2014-0215]

引用

页码：1384 / 1390

页数：7

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