3D Fiber Probe: State of the Art and New Developments

被引：0
|
作者：
Linz, S. [1 ]
Schoech, A. [1 ]
Bach, C. [1 ]
Ettemeyer, A. [1 ]
Hopp, B. [2 ]
Andraes, M. [2 ]
机构：
[1] Interstate Univ Appl Sci Technol, Buchs NTB, Inst PWO, Buchs, Switzerland
[2] Werth Messtechn GmbH, Giessen, Germany
来源：
2012 INTERNATIONAL SYMPOSIUM ON OPTOMECHATRONIC TECHNOLOGIES (ISOT) | 2012年
关键词：
Multi sensor coordinate measurement; fiber probe; interferometer; speckle; Foucault sensor;
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
Increasing manufacturing accuracy requirements enforce the development of innovative and highly sensitive measuring tools. Fiber probes combine classical tactile measurement with optical read out. These probes allow extremely small contact force and reach measurement uncertainties better than a micrometer. To even further reduce these values, a new measuring principle based on interferometry is being developed.
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页数：4
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