Fabrication process for integration of SU-8 check valves on printed circuit board- based microfluidic platforms

A fabrication process to integrate SU-8 check valves on a microfluidic platform based on a printed circuit board (PCB) is reported. The process allows the fabrication and the integration of these devices with PCB substrates at the same time, thus obtaining a PCB/SU-8 hybrid system with no need of assembly. The SU-8 valves fabricated as proof of concept are composed of four or two suspensions and a plate. The fabrication results confirm the validity of the procedure of the fabrication to build these kinds of microstructures. The behaviour of the valves has experimentally been studied showing good results, demonstrating that the integration of these microelectromechanical systems devices with the PCB technology is compatible.