GROWTH CHARACTERISTICS AND PROPERTIES OF AL-DOPED ZnO THIN FILMS BY DC MAGNETRON SPUTTERING FROM AZOY® TARGET

被引：9

作者：

Yao, Pin-Chuan ^{[1
]}

Hang, Shih-Tse ^{[2
]}

Wu, Menq-Jiun ^{[2
]}

机构：

[1] Da Yeh Univ, Dept Mat Sci & Engn, Changhua 51591, Taiwan

[2] Natl Changhua Univ Educ, Dept Mechatron Engn 2, Changhua, Taiwan

来源：

TRANSACTIONS OF THE CANADIAN SOCIETY FOR MECHANICAL ENGINEERING | 2013年 / 37卷 / 03期

关键词：

Al-doped ZnO; DC magnetron sputtering; hydrogen; TRANSPARENT CONDUCTING FILMS; INDIUM-TIN-OXIDE; ZINC-OXIDE; ELECTRICAL-PROPERTIES; HIGHLY TRANSPARENT; OPTICAL-PROPERTIES; ROOM-TEMPERATURE; DEPOSITION; SUBSTRATE; STRESS;

D O I：

10.1139/tcsme-2013-0020

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Transparent conducting Al-doped ZnO (AZO) thin films were deposited on soda-lime glass substrates by DC magnetron sputtering with a novel sintered ceramic target, AZOY (R) that contains a small amount of Y2O3 in addition to Al2O3 and ZnO. The effect of substrate temperature (T-s) on the structural, electrical and optical properties of the prepared AZO films was evaluated extensively. By elevating T-s, both the electrical conductivity and optical transmittance in the Vis/NIR region of the film could be effectively improved. The substrate heating is closely related to the crystallinity and the surface morphology of the deposited films. It is noteworthy that by employing this target material, high quality AZO thin films could be deposited with a simple and cost effective DC magnetron sputtering system.

引用

页码：303 / 312

页数：10

共 29 条

[1] Transparent conducting oxide films for thin film silicon photovoltaics [J].

Beyer, W. ;

Huepkes, J. ;

Stiebig, H. .

THIN SOLID FILMS, 2007, 516 (2-4) :147-154

[2] Growth characteristics and residual stress of RF magnetron sputtered ZnO:Al films [J].

Chang, JF ;

Shen, CC ;

Hon, MH .

CERAMICS INTERNATIONAL, 2003, 29 (03) :245-250

[3] The effect of deposition temperature on the properties of Al-doped zinc oxide thin films [J].

Chang, JF ;

Hon, MH .

THIN SOLID FILMS, 2001, 386 (01) :79-86

[4] Structural, electrical, and optical properties of transparent conductive oxide ZnO:Al films prepared by dc magnetron reactive sputtering [J].

Chen, M ;

Pei, ZL ;

Wang, X ;

Sung, C ;

Wen, LS .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A, 2001, 19 (03) :963-970

[5]

Ellmer K., 2007, Transparent Conductive Zinc Oxide: Basics and Applications in Thin Film Solar Cells

[6] Growth of ZnO:Ga thin films at room temperature on polymeric substrates:: thickness dependence [J].

Fortunato, E ;

Gonçalves, A ;

Assunçao, V ;

Marques, A ;

Aguas, H ;

Pereira, L ;

Ferreira, I ;

Martins, R .

THIN SOLID FILMS, 2003, 442 (1-2) :121-126

[7] THE OXIDATION OF ZINC IN AIR STUDIED BY XPS AND AES [J].

HAMMER, GE ;

SHEMENSKI, RM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1983, 1 (02) :1026-1028

[8] XPS and X-ray diffraction studies of aluminum-doped zinc oxide transparent conducting films [J].

Islam, MN ;

Ghosh, TB ;

Chopra, KL ;

Acharya, HN .

THIN SOLID FILMS, 1996, 280 (1-2) :20-25

[9] SUBSTRATE-DEPENDENT INTERNAL-STRESS IN SPUTTERED ZINC-OXIDE THIN-FILMS [J].

JOU, JH ;

HAN, MY ;

CHENG, DJ .

JOURNAL OF APPLIED PHYSICS, 1992, 71 (09) :4333-4336

[10] Sol-gel derived highly transparent and conducting yttrium doped ZnO films [J].

Kaur, Ravinder ;

Singh, A. V. ;

Mehra, R. M. .

JOURNAL OF NON-CRYSTALLINE SOLIDS, 2006, 352 (23-25) :2335-2338

← 1 2 3 →