Decomposition of thin Au films on flat and structured Si substrate by annealing

被引：15

作者：

Batic, Barbara Setina ^{[1
]}

Verbovsek, Tim ^{[1
,2
]}

Setina, Janez ^{[1
]}

机构：

[1] Inst Met & Technol, Lepi Pot 11, Ljubljana 1000, Slovenia

[2] Jozef Stefan Int Postgrad Sch, Jamova 39, Ljubljana 1000, Slovenia

来源：

VACUUM | 2017年 / 138卷

关键词：

Thin films; Annealing; Dewetting; Scanning electron microscopy; Electron backscatter diffraction; NANOPARTICLES; FABRICATION; NUCLEATION; GROWTH;

D O I：

10.1016/j.vacuum.2016.12.006

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Thin metallic films are unstable under thermal treatment and disintegrate into particles in a process known as solid state dewetting. This process was studied by annealing 30 nm thin gold films, deposited on flat and structured silicon substrates, by means of electron scanning microscopy and electron back scattered diffraction. Two different modes of decomposition were observed; formation of doughnut shaped islands which coalesced into dendritic particles of gold with a network of gold particles in between, and patterns which start as circular holes with pronounced rims and subsequently develop in a typical pattern. In the case of structured substrates confinement of particles within ridges was observed for deep scratches, while shallower scratches allowed some spill over of the material. (C) 2016 Elsevier Ltd. All rights reserved.

引用

页码：134 / 138

页数：5

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