Fabrication of polymer antireflection structures by injection molding using ordered anodic porous alumina mold

被引：15

作者：

Yanagishita, Takashi ^{[1
]}

Masui, Mikio ^{[2
]}

Ikegawa, Naoto ^{[2
]}

Masuda, Hideki ^{[1
]}

机构：

[1] Tokyo Metropolitan Univ, Dept Appl Chem, Hachioji, Tokyo 1920397, Japan

[2] Panason Co, Osaka 5718686, Japan

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2014年 / 32卷 / 02期

关键词：

Molds - Alumina - Polycarbonates - Aluminum oxide - Fabrication;

D O I：

10.1116/1.4868030

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Polymer antireflection structures were fabricated by injection molding using anodic porous alumina or a Ni replica as a mold. An ordered array of tapered pillars or holes was successfully formed on the surface of polycarbonate plates. The obtained polymer antireflection structures exhibit a lower reflectance than a smooth polycarbonate surface. (C) 2014 American Vacuum Society.

引用

页数：5

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