Electrothermally actuated Fabry-Perot tunable filter with a high tuning efficiency

被引：11

作者：

Kim, CK ^{[1
]}

Lee, ML ^{[1
]}

Jun, CH ^{[1
]}

机构：

[1] Elect & Telecommun Res Inst, Basic Res Lab, Taejon 305350, South Korea

来源：

IEEE PHOTONICS TECHNOLOGY LETTERS | 2004年 / 16卷 / 08期

关键词：

Fabry-Perot interferometers; microelectromechanical (MEMS) devices; thermoelectric devices; tunable filters;

D O I：

10.1109/LPT.2004.831060

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We report on a electrothermally actuated Fabry-Perot wavelength tunable filter with a high tuning efficiency by using surface micromachining. To prevent a current flowing through the mirror, a Wheatstone bridge structure is introduced. Because the full wafer is monolithically grown and the electrodes are formed in a single step, the fabrication processes is simple and reproducible. As the current flows through the two parallel thermal actuators, the top mirror moves away from the bottom mirror so that a sticking problem does not occur. The maximum voltage for the 69-nm wavelength tuning by using a 5.2-mum-thick filter structure is only 1.7 V and the high tuning efficiency of similar to75 nm/mW is achieved.

引用

页码：1894 / 1896

页数：3

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