Fabrication and characterization of the piezoelectric microtransformer based on microelectromechanical systems

被引：11

作者：

Kim, Seong Kon ^{[1
]}

Seo, Young Ho ^{[1
]}

机构：

[1] Korea Inst Machinery & Mat, Taejon 305343, South Korea

来源：

APPLIED PHYSICS LETTERS | 2006年 / 88卷 / 26期

关键词：

D O I：

10.1063/1.2218056

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

In this letter, the design, fabrication, and characterization of a novel piezoelectric microtransformer with bar geometry are presented. The piezoelectric microtransformers were fabricated using PZT thin films and microelectromechanical system technologies. The dimensions of these devices are 1000x400x5.8 mu m(3) (lengthxwidthxthickness). The dynamic displacement of around 9.2 +/- 0.064 mu m was observed at 10V(ac). The dynamic displacement varied almost linearly with voltage. When driven at the input voltage of 3V(ac), the output voltage of the piezoelectric microtransformer was 6.4V(ac) at the resonant frequency (F-r), 8.006 kHz and load resistance (R-L), 1 M Omega. The average voltage gain (step-up ratio) was approximately 2.13.

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