Analytical Modeling of beam behavior under different actuations

被引：0

作者：

Sarraute, E ^{[1
]}

Dufour, I ^{[1
]}

机构：

[1] CNRS, URA 1375, LESiR, F-94235 Cachan, France

来源：

1999 INTERNATIONAL CONFERENCE ON MODELING AND SIMULATION OF MICROSYSTEMS | 1999年

关键词：

modeling; beam; electrostatic; magnetic; piezoelectric;

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The aim of this paper is to establish simple analytical equations of the beam deflection for different actuation methods (magnetic with cur-rent, magnetic with magnet, electrostatic and piezoelectric). The analytical formulae are obtained from the study of the physical phenomena. Although the results presented are obtained by making certain approximations, this study provides order of magnitude results for the deflection, and most importantly quantifies the influence of each parameter (current, voltage, thickness, length, etc.).

引用

页码：266 / 269

页数：4

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