Properties of conical microstructures formed on silicon surfaces via nanosecond laser ablation under vacuum

被引：4
作者：
Zhao, Ji-Hong [1 ,2 ]
Li, Chun-Hao [1 ]
Wang, Jian-Nan [1 ]
机构：
[1] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China
[2] Jilin Univ, Coll Mat Sci & Engn, Changchun 130012, Peoples R China
来源：
OPTICAL AND QUANTUM ELECTRONICS | 2016年 / 48卷 / 01期
基金：
中国博士后科学基金;
关键词：
Silicon; Nanosecond laser pulses; Conical microstructures; IR absorption; Superhydrophobic; INFRARED-ABSORPTION; OPTICAL-PROPERTIES; FEMTOSECOND; IRRADIATION; ATMOSPHERES; FABRICATION; PULSES; ARRAYS;
D O I：
10.1007/s11082-015-0312-1
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We fabricated conical microstructures onto a silicon surface via nanosecond laser ablation at 355 nm in a vacuum. The silicon surface coved with these conical microstructures exhibited strong optical absorbance for UV-VIS-NIR wavelengths (from 0.25 to 2.5 mu m). The transmission properties at infrared wavelengths (2.5-24 mu m) for this ns laser ablated silicon was also discussed. In addition, the microstructured silicon surface exhibited excellent super-hydrophobicity with the highest water contact angle near 160 degrees.
引用
收藏
页码：1 / 7
页数：7
相关论文
共 50 条
[41]   Dopant and fluence effects on the ablation of silicon surfaces under pulsed CO2 laser irradiation [J].
Sakka, T ;
Hotta, K ;
Akiba, S ;
Kuroyanagi, A ;
Ogata, YH ;
Mabuchi, M .
APPLIED SURFACE SCIENCE, 1998, 127 :71-75
[42]   Photoluminescence properties of silicon nanocrystals grown by nanosecond laser ablation of solid-state targets in an inert gas atmosphere [J].
Morozov, M. O. ;
Zavestovskaya, I. N. ;
Kabashin, A. V. ;
Timoshenko, V. Yu. .
BULLETIN OF THE LEBEDEV PHYSICS INSTITUTE, 2017, 44 (12) :353-356
[43]   Photoluminescence properties of silicon nanocrystals grown by nanosecond laser ablation of solid-state targets in an inert gas atmosphere [J].
M. O. Morozov ;
I. N. Zavestovskaya ;
A. V. Kabashin ;
V. Yu. Timoshenko .
Bulletin of the Lebedev Physics Institute, 2017, 44 :353-356
[44]   Formation of periodic superhydrophilic microstructures by infrared nanosecond laser processing of single-crystal silicon [J].
Starinskiy, Sergey V. ;
Rodionov, Alexey A. ;
Shukhov, Yuri G. ;
Safonov, Alexey I. ;
Maximovskiy, Eugene A. ;
Sulyaeva, Veronica S. ;
Bulgakov, Alexander V. .
APPLIED SURFACE SCIENCE, 2020, 512
[45]   Cluster emission under femtosecond laser ablation of silicon [J].
Bulgakov, AV ;
Ozerov, I ;
Marine, W .
THIN SOLID FILMS, 2004, 453 :557-561
[46]   High power single-shot laser ablation of silicon with nanosecond 355 nm [J].
Karnakis, D. M. .
APPLIED SURFACE SCIENCE, 2006, 252 (22) :7823-7825
[47]   Specifications of nanosecond laser ablation with solid targets, aluminum, silicon rubber, and polymethylmethacrylate (PMMA) [J].
Morshedian, Nader .
PLASMA SCIENCE & TECHNOLOGY, 2017, 19 (09)
[48]   Formation of linked nanostructure-textured mound-shaped microstructures on stainless steel surface via femtosecond laser ablation [J].
Li, Yingqi ;
Cui, Zeqin ;
Wang, Wenxian ;
Lin, Chenghsiang ;
Tsai, Hai-Lung .
APPLIED SURFACE SCIENCE, 2015, 324 :775-783
[49]   Modelling picosecond and nanosecond laser ablation for prediction of induced damage on textured SiNx/Si surfaces of Si solar cells [J].
Shen, Xiaowei ;
Hsiao, Pei-Chieh ;
Wang, Zhimeng ;
Liu, Mengdi ;
Phua, Benjamin ;
Song, Ning ;
Stokes, Alex ;
Lennon, Alison .
PROGRESS IN PHOTOVOLTAICS, 2021, 29 (09) :1020-1033
[50]   Hybrid micro and nanostructured silicon surfaces fabricated by laser ablation and electrochemistry [J].
Robledo-Taboada, Luis Humberto ;
Chinas-Castillo, Fernando ;
Caballero-Caballero, Magdaleno ;
Camacho-Lopez, Santiago ;
Mendez-Blas, Antonio ;
Jimenez-Jarquin, Javier Francisco ;
Feria-Reyes, Rossy ;
Suarez-Martinez, Reynier ;
Rosa, Laura Elvira Serrano-de la ;
Barranco-Cisneros, Jacob ;
Alavez-Ramirez, Rafael .
JOURNAL OF MATERIALS RESEARCH AND TECHNOLOGY-JMR&T, 2024, 33 :3275-3282
12345