Properties of conical microstructures formed on silicon surfaces via nanosecond laser ablation under vacuum

被引：4

作者：

Zhao, Ji-Hong ^{[1
,2
]}

Li, Chun-Hao ^{[1
]}

Wang, Jian-Nan ^{[1
]}

机构：

[1] Jilin Univ, Coll Elect Sci & Engn, State Key Lab Integrated Optoelect, Changchun 130012, Peoples R China

[2] Jilin Univ, Coll Mat Sci & Engn, Changchun 130012, Peoples R China

来源：

OPTICAL AND QUANTUM ELECTRONICS | 2016年 / 48卷 / 01期

基金：

中国博士后科学基金;

关键词：

Silicon; Nanosecond laser pulses; Conical microstructures; IR absorption; Superhydrophobic; INFRARED-ABSORPTION; OPTICAL-PROPERTIES; FEMTOSECOND; IRRADIATION; ATMOSPHERES; FABRICATION; PULSES; ARRAYS;

D O I：

10.1007/s11082-015-0312-1

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We fabricated conical microstructures onto a silicon surface via nanosecond laser ablation at 355 nm in a vacuum. The silicon surface coved with these conical microstructures exhibited strong optical absorbance for UV-VIS-NIR wavelengths (from 0.25 to 2.5 mu m). The transmission properties at infrared wavelengths (2.5-24 mu m) for this ns laser ablated silicon was also discussed. In addition, the microstructured silicon surface exhibited excellent super-hydrophobicity with the highest water contact angle near 160 degrees.

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页码：1 / 7

页数：7

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