Miniaturized time-scanning Fourier transform spectrometer based on silicon technology

被引：164

作者：

Manzardo, O ^{[1
]}

Herzig, HP ^{[1
]}

Marxer, CR ^{[1
]}

de Rooij, NF ^{[1
]}

机构：

[1] Univ Neuchatel, Inst Microtech, CH-2000 Neuchatel, Switzerland

来源：

OPTICS LETTERS | 1999年 / 24卷 / 23期

关键词：

D O I：

10.1364/OL.24.001705

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We present a miniaturized Fourier transform spectrometer (FTS) based on optical microelectromechanical system technology. The FTS is a Michelson interferometer with one scanning mirror. A new type of electrostatic comb drive actuator moves the mirror. We have measured a nonlinearity of the driving system of +/-0.5 mu m for a displacement of 38.5 mu m. A method is presented to correct the spectrum to get rid of the nonlinearity. The driving reproducibility is +/-25 nm. The measured resolution of the spectrometer after the phase correction is 6 nm at a wavelength of 633 nm. (C) 1999 Optical Society of America.

引用

页码：1705 / 1707

页数：3

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