Nanostructure engineering in porous columnar thin films: recent advances

被引：127

作者：

Steele, John J. ^{[1
]}

Brett, Michael J. ^{[1
]}

机构：

[1] Univ Alberta, Dept Elect & Comp Engn, Edmonton, AB T6G 2V4, Canada

来源：

JOURNAL OF MATERIALS SCIENCE-MATERIALS IN ELECTRONICS | 2007年 / 18卷 / 04期

关键词：

D O I：

10.1007/s10854-006-9049-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Glancing angle deposition (GLAD) is a physical vapour deposition method used to fabricate highly functional thin films with an engineerable columnar morphology. Recent developments in GLAD technology have produced columnar nanostructures of increased complexity, including periodic, nanofibrous, perforated, and graded porosity thin films for use in applications ranging from sensors and actuators to optical filters, microfluidics, and catalysis. A brief review of GLAD methodology and historical developments is followed by a discussion of the latest developments in this field.

引用

页码：367 / 379

页数：13

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