Fabrication of micro patterned substrate by powder injection molding

被引：1

作者：

Lee, Hyeongjae ^{[1
]}

Jang, Jin Man ^{[1
]}

Lee, Jin-Hyung ^{[2
]}

Kim, Yong-in ^{[1
]}

Park, Sungchan ^{[1
]}

Ko, Se-hyun ^{[1
]}

Lee, Wonsik ^{[1
]}

机构：

[1] Korea Inst Ind Technol, Adv Fus Proc R&D Grp, Inchon 406840, South Korea

[2] Korea Inst Sci & Technol, Ctr Biomicrosyst, Seoul 136791, South Korea

来源：

MATERIALS PROCESSING AND MANUFACTURING III, PTS 1-4 | 2013年 / 753-755卷

关键词：

micro powder injection molding; PIM; micro fluidic device;

D O I：

10.4028/www.scientific.net/AMR.753-755.141

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

In this study, a micro patterned substrate was manufactured by micro powder injection molding (mu PIM). As a mold for forming the micro patterned substrate, a metal mold having a linewidth of 100 um was fabricated by micro photo etching process. The specimen prepared through such a process had a sound shape at a shrinkage rate of 16.7% with respect to the mold. To verify industrial applicability of the micro patterned substrate, a micro-fluidic device was fabricated using a smooth flow of fluid therethrough. These results indicated that the micro powder injection molding is useful for micro-fluidics.

引用

页码：141 / +

页数：2

共 3 条

[1] Selective stamp bonding of PDMS microfluidic devices to polymer substrates for biological applications [J].

Li, Xiang ;

Wu, Nianqiang ;

Rojanasakul, Yon ;

Liu, Yuxin .

SENSORS AND ACTUATORS A-PHYSICAL, 2013, 193 :186-192

[2] Characterization of powder injection molding feedstock [J].

Liu, ZY ;

Loh, NH ;

Tor, SB ;

Khor, KA .

MATERIALS CHARACTERIZATION, 2002, 49 (04) :313-320

[3] The manufacturing and replication of microfluidic mould inserts by the hot embossing process [J].

Sahli, M. ;

Millot, C. ;

Gelin, J. -C. ;

Barriere, T. .

JOURNAL OF MATERIALS PROCESSING TECHNOLOGY, 2013, 213 (06) :913-925

← 1 →