Lead chalcogenide on silicon infrared sensor arrays: Noise mechanisms and 2-d arrays on active chips

被引:0
|
作者
Alchalabi, K [1 ]
Zimin, D [1 ]
Kellermann, K [1 ]
Zogg, H [1 ]
机构
[1] Swiss Fed Inst Technol, Thin Film Phys Grp, Zurich, Switzerland
来源
PROCEEDINGS OF THE 10TH INTERNATIONAL CONFERENCE ON NARROW GAP SEMICONDUCTORS AND RELATED SMALL ENERGY PHENOMENA, PHYSICS AND APPLICATIONS | 2001年 / 2卷
关键词
lead chalcogenide; silicon substrate; heteroepitaxy; dislocations; electronic properties; noise; focal plane array;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Epitaxial IV-VI layers grown by molecular beam epitaxy on Si(1 1 1)-substrates exhibit high structural quality, but typical dislocation densities in the 10(6) to 10(8) cm(-2) range. The sensitivities of photovoltaic p-n(+) sensors (RoA-products) fabricated in PbTe-on-Si layers are, despite these dislocation densities, up to 100 Omegacm(2) at 95K. They scale with the dislocation densities: each dislocation crossing the active area gives rise to a shunt resistance. - A 2-d infrared focal plane array in an epitaxial narrow gap semiconductor material on a Si substrate which contains the read out circuits was demonstrated for the first time: Photovoltaic PbTe-on-Si for the 3-5 mum wavelength range was successfully processed to a 96 x 128 monolithic narrow-gap - silicon array. Mean Ro are 4 MO at 100K.
引用
收藏
页码:51 / 54
页数:4
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