Single asperity tribochemical wear of silicon by atomic force microscopy

被引:56
作者
Katsuki, Futoshi [1 ]
机构
[1] Sumitomo Met Ind Ltd, Corp Res & Dev Labs, Amagasaki, Hyogo 6600891, Japan
关键词
SCALE REMOVAL MECHANISM; GLASS; SURFACES; STRESS; SIO2; AFM; KOH;
D O I
10.1557/JMR.2009.0024
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Measurements of single asperity wear oil oxidized silicon surface in aqueous potassium hydroxide (KOH) using atomic force microscopy (AFM), where the single crystal silicon tip was used both to tribologically load and image the Surface, is presented. AFM was also operating in the lateral (frictional) force mode to investigate the pH dependence of kinetic friction between the tip and the SiO(2) surface. It was shown that the Si tip wear amount strongly depended oil the solution pH value and was at a maximum at around pH 10. It Was also found that the Si removal volume in mol was approximately equal to that of SiO(2) irrespective of the solution pH value. This equality implies that the formation of the Si-O-Si bridge between one Si atom of the tip and one SiO(2) molecule of the specimen at the wear interface. The Surface of the Si tip is then oxidized. Finally, the bond rupture by the tip movement Will occur, the dimeric silica (OH)(3)Si-O-Si(OH)(3). including the Si-O-Si bridge, is dissolved in the KOH Solution. The frictional signal is also sensitive to the pH Values of the solution and peaked at around pH 10. These results indicate that the removal behavior of the Si tip and SiO(2), surface would be affected by the frictional force between the Si and the SiO(2) because of ail increased liquid temperature and a compressive stress in Si and SiO(2) networks. Strong influence is observed by the pH of the ambient Solution confirming the important role of the OH(-) in the wear mechanism. Pressure dependence of the microwear behavior under aqueous electrolyte solutions has also been investigated. A microscopic removal mechanism, which is determined by interplay of the diffusion of water in Si and SiO(2) is presented.
引用
收藏
页码:173 / 178
页数:6
相关论文
共 18 条
  • [1] Abiade JT, 2005, MATER RES SOC SYMP P, V867, P69
  • [2] CHEMICAL PROCESSES IN GLASS POLISHING
    COOK, LM
    [J]. JOURNAL OF NON-CRYSTALLINE SOLIDS, 1990, 120 (1-3) : 152 - 171
  • [3] GRAF D, 1989, J VAC SCI TECHNOL A, V7, P807
  • [4] The influence of pH on friction between oxide surfaces in electrolytes, studied with lateral force microscopy: application as a nanochemical imaging technique
    Haehner, Georg
    Marti, Andreas
    Spencer, Nicholas D.
    [J]. TRIBOLOGY LETTERS, 1997, 3 (04) : 359 - 365
  • [5] Imoto R, 2007, MATER RES SOC SYMP P, V991, P93
  • [6] ITO S, 1981, J AM CERAM SOC, V64, pC160, DOI 10.1111/j.1151-2916.1981.tb15881.x
  • [7] KANEKO R, 1995, HDB MICRO NANO TRIBO, P183
  • [8] AFM studies on the difference in wear behavior between Si and SiO2 in KOH solution
    Katsuki, F
    Kamei, K
    Saguchi, A
    Takahashi, W
    Watanabe, J
    [J]. JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2000, 147 (06) : 2328 - 2331
  • [9] The atomic-scale removal mechanism during Si tip scratching on Si and SiO2 surfaces in aqueous KOH with an atomic force microscope
    Katsuki, F
    Saguchi, A
    Takahashi, W
    Watanabe, J
    [J]. JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS, 2002, 41 (7B): : 4919 - 4923
  • [10] Sensitivity of frictional forces to pH on a nanometer scale: A lateral force microscopy study
    Marti, A
    Hahner, G
    Spencer, ND
    [J]. LANGMUIR, 1995, 11 (12) : 4632 - 4635