Cubic Frequency Temperature Dependence in Periodic Structures of Recessed Electrodes on Quartz

被引:3
作者
Grigorievskii, V. I. [1 ]
Plessky, V. P. [1 ]
机构
[1] FIRE RAS, Fryazino 141190, Moscow Region, Russia
来源
2012 IEEE INTERNATIONAL ULTRASONICS SYMPOSIUM (IUS) | 2012年
关键词
SAW; Quartz; Resonator; Temperature stability;
D O I
10.1109/ULTSYM.2012.0200
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
It is shown that the cubic frequency temperature characteristic of a surface acoustic wave (SAW) quartz resonator with electrodes positioned at the groove bottoms can be obtained. The admittance characteristics of periodic structures of aluminum electrodes positioned at the groove bottoms of a quartz substrate were calculated using FEM analysis and periodic Green's function method. The temperature coefficients of quartz material constants as well as temperature variations of geometrical dimensions of a unit cell were included in calculations. The temperature dependency of resonant frequency at the upper end of the reflection stop band shows cubic behavior with maximum frequency deviation +/-10 ppm in the temperature range from -30 degrees to +80 degrees C. The compensation of a non-zero second order temperature frequency coefficient can be possible due to temperature variation of the reflection coefficient in the periodic structure of electrodes and grooves.
引用
收藏
页码:803 / 806
页数:4
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