Silicon photodetector for integrated lithium niobate photonics

被引：66

作者：

Desiatov, Boris ^{[1
]}

Loncar, Marko ^{[1
]}

机构：

[1] Harvard Univ, JA Paulson Sch Engn & Appl Sci, Cambridge, MA 02138 USA

来源：

APPLIED PHYSICS LETTERS | 2019年 / 115卷 / 12期

基金：

美国国家科学基金会;

关键词：

WAVE-GUIDES;

D O I：

10.1063/1.5118901

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

We demonstrate the integration of an amorphous silicon photodetector with a thin film lithium niobate photonic platform operating in the visible wavelength range. We present the details of the design, fabrication, integration, and experimental characterization of this metal-semiconductor-metal photodetector that features a responsivity of 22 mA/W to 37 mA/W over the wide optical bandwidth spanning in the 635 nm-850 nm wavelength range.

引用

页数：5

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