Fabrication of microlenses with continuously variable numerical aperture through a temporally shaped femtosecond laser

被引：28
作者：
Qin, Bin [1 ]
Li, Xiaowei [1 ]
Yao, Zhulin [1 ]
Huang, Ji [1 ]
Liu, Yang [1 ]
Wang, Andong [1 ]
Gao, Shuai [1 ]
Zhou, Shipeng [1 ]
Wang, Zhi [1 ]
机构：
[1] Beijing Inst Technol, Sch Mech Engn, Laser Micro Nanofabricat Lab, Beijing 100081, Peoples R China
来源：
OPTICS EXPRESS | 2021年 / 29卷 / 03期
基金：
中国国家自然科学基金;
关键词：
ARRAY; MECHANISMS; GLASSES; WATER;
D O I：
10.1364/OE.411511
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
We developed a novel method for fabricating microlenses and microlens arrays by controlling numerical aperture (NA) through temporally shaped femtosecond laser on fused silica. The modification area was controlled through the pulse delay of temporally shaped femtosecond laser. The final radius and sag height were obtained through subsequent hydrofluoric acid etching. Electron density was controlled by the temporally shaped femtosecond laser, and the maximum NA value (0.65) of a microlens was obtained in the relevant studies with femtosecond laser fabrication. Furthermore, the NA can be continuously adjusted from 0.1 to 0.65 by this method. Compared with the traditional methods, this method exhibited high flexibility and yielded microlenses with various NAs and microlens arrays to meet the different demands for microlens applications. (C) 2021 Optical Society of America under the terms of the OSA Open Access Publishing Agreement
引用
收藏
页码：4596 / 4606
页数：11
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