Vacuum-ultraviolet light emission from xenon directly excited by ballistic output electrons of nanocrystalline silicon planar cathode

被引:10
作者
Ichihara, Tsutomu [1 ]
Hatai, Takashi [1 ]
Koshida, Nobuyoshi [2 ]
机构
[1] Panason Elect Works Co Ltd, New Prod Technol Dev Dept, Osaka 5718686, Japan
[2] Tokyo Univ Agr & Technol, Grad Sch Engn, Koganei, Tokyo 1848588, Japan
来源
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 2009年 / 27卷 / 02期
关键词
EFFICIENT;
D O I
10.1116/1.3070655
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The effect of electron incidence into xenon gas molecules has been investigated by using a nanocrystalline silicon (nc-Si) planar ballistic emitter. Vacuum-ultraviolet light emission is observed without discharging when the nc-Si device is driven in xenon gas. The emission spectrum of xenon at 10 kPa shows peaks at 152 and 172 nm which originate from Xe-2* radiation. These results strongly suggest that energetic electrons directly excite xenon molecules followed by radiative relaxations. The observed effect is potentially applicable to mercury-free, efficient, and stable fiat panel light sources. (C) 2009 American Vacuum Society. [DOI: 10.1116/1.3070655]
引用
收藏
页码:772 / 774
页数:3
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