Gas Sensing Studies of Pulsed Laser Deposition Deposited WO3 Nanorod Based Thin Films

WO3 nanorod based thin films were deposited via pulsed laser deposition onto quartz conductometric transducers with pre-patterned gold interdigitated transducers (IDT) employing the shortest wavelength (193 nm) ArF excimer laser. Micro-characterization techniques such as scanning electron microscopy (S EM), X-ray diffraction (XRD) and transmission electron microscopy (TEM) were employed to study surface morphology and crystal structure. It was observed that the fabricated films showed nanocolumnar features perpendicular to the surface. The measured sizes of the nanorods were found to be approximately 50 nm in diameter. The high resolution TEM (HRTEM) image of the nanorods based WO3 showed the WO3 lattice spacing of 3.79 angstrom corresponding to the (020) plane of monoclinic WO3. Gas sensing characterizations of the developed sensors were tested towards hydrogen and ethanol at temperatures between room and 400 degrees C. The sensor exhibited high response towards H-2 and ethanol at operating temperatures of 170 and 400 degrees C, respectively. The excellent sensing characteristics of WO3 films towards ethanol and H-2 at low concentrations offer great potential for low cost and stable gas sensing.