Monte Carlo simulation of epitaxial growth in ultra-thin films

被引:13
|
作者
Ye, JS [1 ]
Hu, XJ
机构
[1] Shanghai Jiao Tong Univ, Sch Mat Sci & Engn, Shanghai 200030, Peoples R China
[2] Shanghai Jiao Tong Univ, State Key Lab MMCM, Shanghai 200030, Peoples R China
关键词
ultra-thin films; Monte-Carlo method; expitaxy growth; Morse potential; fractal;
D O I
10.7498/aps.51.1108
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
The epitaxial growth of ultra - thin films was simulated by Monte Carlo method. The effect of the interaction between particles was described using Morse potential. Three processes of particle deposition, adatom diffusion and adatom evaporation were taken into account in our model. The effects of the range of interparticle interaction alpha and the maximum steps that a particle was permitted to migrate on the morphology of ultra-thin films were investigated. The results show that under different alpha, the films' growth undergoes four stages: disperse, fractal, mixture of fractal and conglobating, and conglobating with the increase of particle's migrating steps. Especially, when alpha is 6, the disperse growth is hardly observed. In addition, the less the alpha and the less the particle's migrating steps, the more easily the particles tend to be in disperse growth.
引用
收藏
页码:1108 / 1112
页数:5
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