Synthesis and characterization of ZrO2 thin films

被引：4

作者：

Kozik, V. V. ^{[1
]}

Borilo, L. P. ^{[1
]}

Borilo, L. N. ^{[1
]}

机构：

[1] Tomsk State Univ, Tomsk 634050, Russia

来源：

RUSSIAN JOURNAL OF INORGANIC CHEMISTRY | 2009年 / 54卷 / 05期

关键词：

ZIRCONIUM;

D O I：

10.1134/S0036023609050027

中图分类号：

O61 [无机化学];

学科分类号：

070301 ; 081704 ;

摘要：

Physicochemical processes involved in the preparation of zirconia thin films by sol-gel technology from film-forming solutions (FFSs) on the basis of zirconium oxochloride and ethanol were studied. The phase composition, structure, and properties of the films were determined.

引用

页码：658 / 663

页数：6

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