Terahertz Metamaterial Absorbers Implemented in CMOS Technology for Imaging Applications: Scaling to Large Format Focal Plane Arrays

被引：92

作者：

Carranza, Ivonne Escorcia ^{[1
]}

Grant, James P. ^{[1
]}

Gough, John ^{[2
]}

Cumming, David ^{[1
]}

机构：

[1] Univ Glasgow, Sch Engn, Microsyst Technol Grp, Glasgow G12 8LT, Lanark, Scotland

[2] Univ Glasgow, Sch Engn, Glasgow G12 8LT, Lanark, Scotland

来源：

IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS | 2017年 / 23卷 / 04期

基金：

英国工程与自然科学研究理事会;

关键词：

Uncooled bolometers; CMOS image sensors; terahertz imaging; terahertz metamaterials; MULTISPECTRAL MATERIALS HYBRIDIZATION; OPTICAL PLASMONIC FILTERS; PIXEL; DRUGS;

D O I：

10.1109/JSTQE.2016.2630307

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

We present the design and fabrication of terahertz (THz) metamaterial (MM) absorbers and their monolithic integration into a commercial CMOS technology along with its respective readout electronics to produce a low-cost, uncooled, and high resolution THz camera. We first describe the work done on single band and broadband MM absorbers on custom substrates, then progress with a description of the integration of such resonators into a six metal layer 180 nm CMOS process and its coupling with two types of microbolometer sensors: Vanadium oxide (VOx) and silicon (Si) pn diode. Additionally, we demonstrate the integration of the THz sensors with readout electronics to form a monolithic THz focal plane array (FPA). Reflection images of a metallic object hidden in a manila envelope are recorded using both the VOx and Si pn diode detectors, demonstrating the suitability of the technology for stand-off detection of concealed objects. Finally, we present the current work toward scaling this technology into a 64 x 64 FPA.

引用

页数：8

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