Moisture Insensitive PMMA Coated Pt-AlGaN/GaN Diode Hydrogen Sensor and Its Thermal Stability

被引：11

作者：

Baik, Kwang Hyeon ^{[1
]}

Jung, Sunwoo ^{[2
]}

Ren, Fan ^{[3
]}

Pearton, S. J. ^{[4
]}

Jang, Soohwan ^{[2
]}

机构：

[1] Hongik Univ, Sch Mat Sci & Engn, Sejong 30016, South Korea

[2] Dankook Univ, Dept Chem Engn, Yongin 16890, South Korea

[3] Univ Florida, Dept Chem Engn, Gainesville, FL 32611 USA

[4] Univ Florida, Dept Mat Sci & Engn, Gainesville, FL 32611 USA

来源：

ECS JOURNAL OF SOLID STATE SCIENCE AND TECHNOLOGY | 2018年 / 7卷 / 07期

基金：

新加坡国家研究基金会;

关键词：

IRRITABLE-BOWEL-SYNDROME; SCHOTTKY DIODE; SENSING CHARACTERISTICS; ROOM-TEMPERATURE; GAN NANONETWORK; FILMS; HETEROSTRUCTURE; PERFORMANCE; KINETICS; SAFETY;

D O I：

10.1149/2.002107jss

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Poly(methyl methacrylate) (PMMA) encapsulated Pt-AlGaN/GaN Schottky diodes show highly sensitive (100 ppm, 0.01% by volume) room temperature detection of hydrogen and are insensitive to the presence of water in the sensing ambient. These diodes show no physical degradation or loss of sensitivity when repeatedly cycled (50 x, 1 min hold at each temperature) between 25-100 degrees C. There is complete selectivity for hydrogen sensing over other gases, including CO, CO2, NO2, O-2 and CH4. The PMMA encapsulation provides an effective and robust barrier to moisture, greatly increasing the range of environments in which the sensors can be used. (C) The Author(s) 2018. Published by ECS.

引用

页码：Q3009 / Q3013

页数：5

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