Increasing the Measurement Range of Plasma Electron Parameters in the Single Langmuir Probe Method

被引：7

作者：

Andreev, S. N. ^{[1
]}

Bernatskiy, A. V. ^{[1
]}

Ochkin, V. N. ^{[1
]}

机构：

[1] Russian Acad Sci, Lebedev Phys Inst, Moscow 119991, Russia

来源：

BULLETIN OF THE LEBEDEV PHYSICS INSTITUTE | 2020年 / 47卷 / 10期

基金：

俄罗斯科学基金会;

关键词：

Low-temperature plasma; hollow cathode discharge; Langmuir probe; IMPURITIES;

D O I：

10.3103/S1068335620100024

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

It is proposed to use a new signal type fed to the single Langmuir probe to measure current-voltage characteristics. It is shown that such an approach makes it possible to increase the range of measured electron energy distribution functions.

引用

页码：317 / 319

页数：3

共 10 条

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