E-beam domain patterning in thin plates of MgO-doped LiNbO3

被引：3

作者：

Vlasov, E. O. ^{[1
]}

Chezganov, D. S. ^{[1
]}

Gimadeeva, L. V. ^{[1
]}

Pashnina, E. A. ^{[1
]}

Greshnyakov, E. D. ^{[1
]}

Chuvakova, M. A. ^{[1
]}

Shur, V. Ya. ^{[1
]}

机构：

[1] Ural Fed Univ, Sch Nat Sci & Math, Ekaterinburg, Russia

来源：

FERROELECTRICS | 2019年 / 542卷 / 01期

基金：

俄罗斯科学基金会;

关键词：

Lithium niobate; thin crystals; electron beam patterning; LITHIUM-NIOBATE; WAVE-GUIDES; INVERSION; LITAO3;

D O I：

10.1080/00150193.2019.1574668

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

The features of the domain patterning in thin lithium niobate crystals were studied. It was shown that decrease in crystal plate thickness led to domain size increase due to limitation of forward growth. The domain size weakly depended on electron energy due to equality of screening charge value at the same doses and various accelerating voltages. The weak dependence of domain sizes on pattern period was attributed to absence of electrostatic interaction of domain walls. The possibility of creation of the through periodical domain structures with the vertical domain walls and period down to 2 mu m in thin crystal was demonstrated.

引用

页码：85 / 92

页数：8

共 29 条

[21] Lithium niobate ridge waveguides and modulators fabricated using smart guide [J].

Rabiei, P ;

Steier, WH .

APPLIED PHYSICS LETTERS, 2005, 86 (16) :1-3

[22] Micro- and nano-domain engineering in lithium niobate [J].

Shur, V. Ya. ;

Akhmatkhanov, A. R. ;

Baturin, I. S. .

APPLIED PHYSICS REVIEWS, 2015, 2 (04)

[23] Domain patterning by electron beam of MgO doped lithium niobate covered by resist [J].

Shur, V. Ya. ;

Chezganov, D. S. ;

Akhmatkhanov, A. R. ;

Kuznetsov, D. K. .

APPLIED PHYSICS LETTERS, 2015, 106 (23)

[24] Micro- and nanodomain imaging in uniaxial ferroelectrics: Joint application of optical, confocal Raman, and piezoelectric force microscopy [J].

Shur, V. Ya ;

Zelenovskiy, P. S. .

JOURNAL OF APPLIED PHYSICS, 2014, 116 (06)

[25] Kinetics of ferroelectric domains:: Application of general approach to LiNbO3 and LiTaO3 [J].

Shur, VY .

JOURNAL OF MATERIALS SCIENCE, 2006, 41 (01) :199-210

[26] Piezoresponse force microscopy (PFM) [J].

Soergel, Elisabeth .

JOURNAL OF PHYSICS D-APPLIED PHYSICS, 2011, 44 (46)

[27]

Vlasov E. O., 2018, IOP Conference Series: Materials Science and Engineering, V443, DOI 10.1088/1757-899X/443/1/012038

[28]

Volk T, 2008, SPRINGER SER MATER S, V115, P1

[29] Raman visualization of micro- and nanoscale domain structures in lithium niobate [J].

Zelenovskiy, P. S. ;

Fontana, M. D. ;

Shur, V. Y. ;

Bourson, P. ;

Kuznetsov, D. K. .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2010, 99 (04) :741-744

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