Comparison between Deflection and Vibration Characteristics of Rectangular and Trapezoidal profile Microcantilevers

被引：41

作者：

Ansari, Mohd. Zahid ^{[1
]}

Cho, Chongdu ^{[1
]}

Kim, Jooyong ^{[1
]}

Bang, Booun ^{[1
]}

机构：

[1] Inha Univ, Dept Mech Engn, Inchon 402751, South Korea

来源：

SENSORS | 2009年 / 9卷 / 04期

关键词：

Sensor; Surface stress; Microcantilever; Resonant Frequency; Deflection; SURFACE STRESS; PIEZORESISTIVE DETECTION; CRYSTALLINE PLATES; FORCE MICROSCOPE; FILM STRESS; CANTILEVERS; TENSION;

D O I：

10.3390/s90402706

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

Arrays of microcantilevers are increasingly being used as physical, biological, and chemical sensors in various applications. To improve the sensitivity of microcantilever sensors, this study analyses and compares the deflection and vibration characteristics of rectangular and trapezoidal profile microcantilevers. Three models of each profile are investigated. The cantilevers are analyzed for maximum deflection, fundamental resonant frequency and maximum stress. The surface stress is modelled as in-plane tensile force applied on the top edge of the microcantilevers. A commercial finite element analysis software ANSYS is used to analyze the designs. Results show paddled trapezoidal profile microcantilevers have better sensitivity.

引用

页码：2706 / 2718

页数：13

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