Step and flash imprint lithography for quantum dots based room temperature single electron transistor fabrication

In this work we demonstrate the successful fabrication using step and flash imprint lithography - reverse tone (SFIL-R)(TM) coupled with a novel Focus ion beam (FIB) quantum dot (QD) deposition technique to produce of a full array of room temperature single electron transistors (RT-SET) based on tungsten quantum dot arrays. The integration of SFIL-R and FIB technology process flow has been developed in order to explore the possibility of an ultra low power, monolithically integrated nano-electronics circuits using RT-SET. We describe the parallel production of RT-SET devices using SFIL-R. The yield of the mass produced devices are examined. These QD based devices are characterized and initial results are evaluated. (C) 2009 Elsevier B.V. All rights reserved.