Effect of nitrogen incorporation on the thermal stability of sputter deposited lanthanum aluminate dielectrics on Si (100)

被引：12

作者：

Sivasubramani, P. ^{[1
]}

Kim, J. ^{[1
]}

Kim, M. J. ^{[1
]}

Gnade, B. E. ^{[1
]}

Wallace, R. M. ^{[1
]}

机构：

[1] Univ Texas, Richardson, TX 75080 USA

来源：

APPLIED PHYSICS LETTERS | 2006年 / 89卷 / 15期

关键词：

D O I：

10.1063/1.2361170

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

The thermal stability of sputter deposited LaAlOx and lanthanum aluminum oxynitride (LaAlON) dielectrics on top of Si (100) was evaluated after 1000 degrees C rapid thermal annealing (RTA). A nitrogen concentration of similar to 3 at. % in the bulk LaAlON film was found to suppress crystallization as well as metal (lanthanum and aluminum) outdiffusion into the Si (100) substrate after the RTA treatment. These results suggest that film microstructure should be carefully controlled to inhibit impurity diffusion in the conventional gate stack fabrication process. (c) 2006 American Institute of Physics.

引用

页数：3

共 35 条

[1]

[Anonymous], 2005, INT TECHN ROADM SEM

[2]

BUSANI T, 2004, MAT RES SOC S P, V786

[3] Infrared and electrical properties of amorphous sputtered (LaxAl1-x)2O3 films [J].

Devine, RAB .

JOURNAL OF APPLIED PHYSICS, 2003, 93 (12) :9938-9942

[4] Effects of sputter deposition parameters and post-deposition annealing on the electrical characteristics of LaAlO3 dielectric films on Si [J].

Edon, V ;

Hugon, MC ;

Agius, B ;

Miotti, L ;

Radtke, C ;

Tatsch, F ;

Ganem, JJ ;

Trimaille, I ;

Baumvol, IJR .

APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2006, 83 (02) :289-293

[5] High temperature stability of Al2O3 dielectrics on Si:: Interfacial metal diffusion and mobility degradation [J].

Guha, S ;

Gusev, EP ;

Okorn-Schmidt, H ;

Copel, M ;

Ragnarsson, LÅ ;

Bojarczuk, NA ;

Ronsheim, P .

APPLIED PHYSICS LETTERS, 2002, 81 (16) :2956-2958

[6]

*INT CTR DIFFR DAT, 010800956 JCPDS INT

[7]

*INT CTR DIFFR DAT, 980000036 JCPDS INT

[8]

*INT CTR DIFFR DAT, 000330716 JCPDS INT

[9]

*INT CTR DIFFR DAT, 000461212 JCPDS INT

[10]

*INT CTR DIFFR DAT, 010850848 JCPDS INT

← 1 2 3 4 →