Nanomechanical resonators operating as charge detectors in the nonlinear regime

被引:47
作者
Krömmer, H
Erbe, A
Tilke, A
Manus, S
Blick, RH
机构
[1] Univ Munich, Ctr NanoSci, D-80539 Munich, Germany
[2] Univ Munich, Sekt Phys, D-80539 Munich, Germany
来源
EUROPHYSICS LETTERS | 2000年 / 50卷 / 01期
关键词
D O I
10.1209/epl/i2000-00241-3
中图分类号
O4 [物理学];
学科分类号
0702 ;
摘要
We present measurements on nanomechanical resonators machined from silicon-on-insulator substrates. The resonators are designed as freely suspended Au/Si beams of lengths on the order of 1-4 mu m and a thickness of 200 nm. The beams are driven into nonlinear response by an applied modulation at radio frequencies;and a static magnet:ic field in plane. The strong hysteresis of the magnetomotive response allows sensitive charge detection by varying the electrostatic potential of a gate electrode.
引用
收藏
页码:101 / 106
页数:6
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