3D sensors and micro-fabricated detector systems

被引：5
|
作者：
Da Via, Cinzia [1 ]
机构：
[1] Univ Manchester, Sch Phys & Astron, Manchester M13 9PL, Lancs, England
来源：
NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION A-ACCELERATORS SPECTROMETERS DETECTORS AND ASSOCIATED EQUIPMENT | 2014年 / 765卷
基金：
美国国家卫生研究院;
关键词：
3D silicon sensor; MEMS; 3D integration; ATLAS pixel upgrade; LHC upgrade; FE-I4; Pixels; Radiation hardness. Micro-channel-cooling; 3D printing; SILICON DETECTORS;
D O I：
10.1016/j.nima.2014.05.087
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Micro-systems based on the Micro Electro Mechanical Systems (MEMS) technology have been used in miniaturized low power and low mass smart structures in medicine, biology and space applications. Recently similar features found their way inside high energy physics with applications in vertex detectors for high-luminosity LHC Upgrades, with 3D sensors, 3D integration and efficient power management using silicon micro-channel cooling. This paper reports on the state of this development. (C) 2014 The Author. Published by Elsevier BA/.
引用
收藏
页码：151 / 154
页数：4
相关论文
共 50 条
  • [31] Micro-fabricated Micro-coaxial Millimeter-wave Components
    Popovic, Zoya
    Vanhille, Kenneth
    Ehsan, Negar
    Cullens, Evan
    Saito, Yuya
    Rollin, Jean-Marc
    Nichols, Christopher
    Sherrer, David
    Fontaine, Daniel
    Filipovic, Dejan
    2008 33RD INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER AND TERAHERTZ WAVES, VOLS 1 AND 2, 2008, : 380 - +
  • [32] Integration of suspended carbon nanotubes into micro-fabricated devices
    Karp, Gabriel A.
    Ya'akobovitz, Assaf
    David-Pur, Moshe
    Ioffe, Zvi
    Cheshnovsky, Ori
    Krylov, Slava
    Hanein, Yael
    JOURNAL OF MICROMECHANICS AND MICROENGINEERING, 2009, 19 (08)
  • [33] Micro-fabricated Millimeter Wave Vacuum Electronic Devices
    Kwon, Ohjoon
    So, Jin-Kyu
    Srivastava, Anurag
    Sattorov, Matlabjon
    Barik, Ranjan Kumar
    Bera, Anirban
    Tanwar, Anil Kumar
    Park, Seung-Hyuk
    Baik, In-Keun
    Choi, Jun-Ho
    Kim, Junyeon
    Yang, Jong-Won
    Kim, Jong-Hyun
    Chang, Suk-Sang
    Park, Gun-Sik
    35TH INTERNATIONAL CONFERENCE ON INFRARED, MILLIMETER, AND TERAHERTZ WAVES (IRMMW-THZ 2010), 2010,
  • [34] PCR-based detection in a micro-fabricated platform
    Bhattacharya, Shantanu
    Salamat, Shuaib
    Morisette, Dallas
    Banada, Padmapriya
    Akin, Demir
    Liu, Yi-Shao
    Bhunia, Arun K.
    Ladisch, Michael
    Bashir, Rashid
    LAB ON A CHIP, 2008, 8 (07) : 1130 - 1136
  • [35] Capacitive micro-fabricated ultrasonic transducers for biometric applications
    Iula, Antonio
    Savoia, Alessandro
    Caliano, Giosue
    MICROELECTRONIC ENGINEERING, 2011, 88 (08) : 2278 - 2280
  • [36] Thermal and structural analysis of micro-fabricated involute regenerators
    Qiu, SG
    Augenblick, JE
    SPACE TECHNOLOGY AND APPLICATIONS INTERNATIONAL FORUM-STAIF 2005, 2005, 746 : 394 - 401
  • [37] Single chamber compact thermosyphons with micro-fabricated components
    Murthy, Sunil S.
    Joshi, Yogendra K.
    Nakayama, Wataru
    Thermomechanical Phenomena in Electronic Systems -Proceedings of the Intersociety Conference, 2000, 2 : 321 - 327
  • [38] A micro-fabricated electrical impedance based hematology analyzer
    Sullivan, Stephanie M.
    Jamieson, Brian G.
    Layton, Bradley E.
    Advances in Bioengineering, 2005, 57 : 5 - 7
  • [39] Flexible capacitive pressure sensors fabricated by 3D printed mould
    Yu, Xuke
    Li, Yifeng
    Yu, Huiyang
    ELECTRONICS LETTERS, 2019, 55 (18) : 999 - 1000
  • [40] Micro-fabricated piezoelectric cantilever for atomic force microscopy
    Watanabe, S
    Fujii, T
    REVIEW OF SCIENTIFIC INSTRUMENTS, 1996, 67 (11): : 3898 - 3903
12345