Self-organized nanostructures in multi-phase epilayers

被引:25
作者
Kim, DC [1 ]
Lu, W [1 ]
机构
[1] Univ Michigan, Dept Engn Mech, Ann Arbor, MI 48109 USA
关键词
D O I
10.1088/0957-4484/15/5/045
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
Recent experiments have shown that multi-phase epilayers may self-organize into ordered nanoscale patterns on a solid substrate. In this paper, we present a phase field model for the self-assembly of three-phase epilayers. Nanoscale patterns are developed by two competing actions: coarsening due to phase boundary energy and refining due to substrate-mediated elastic interaction. The continuum phase field approach leads to a set of nonlinear diffusion equations, which couples the two concentration fields in the epilayer and the stress field in the substrate. Numerical simulations reveal remarkably rich dynamics in the self-assembly of multi-phase epilayers. An epilayer may evolve into various patterns, suggesting a significant degree of experimental control in growing nanoscale structures.
引用
收藏
页码:667 / 674
页数:8
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