atomic force microscopy;
scanning speed control;
imaging quality improvement;
fast scanning;
AMPLITUDE;
FIELD;
D O I:
10.1088/0957-0233/25/4/044005
中图分类号:
T [工业技术];
学科分类号:
08 ;
摘要:
Quantitative, three-dimensional surface imaging is one of the most significant advantages of atomic force microscopy (AFM). The imaging speed, however, is its major issue, due to the limited response time of the feedback loop. We present a dynamically adjusted scanning speed feature implemented on a commercial AFM instrument. The signals available in the system are utilized for that purpose. The auxiliary module controls the scanning speed in order to provide the necessary time to restore the tip-sample distance, which may deviate due to insufficient settling time. The solution allows the measurement to be performed with a relatively fast scanning rate and the desired imaging quality. Quantitative analysis of the results shows the relation between the imaging error and the settings of the system. It is shown that the image is acquired faster and with better imaging quality than using the constant speed method. Also, the data are presented showing a reduction of the topographical crosstalk in the phase imaging feature, as an example of the utilization of this feature in advanced AFM modes.
机构:
Niigata Univ, Grad Sch Med & Dent Sci, Div Microscop Anat & Bioimaging, Chuo Ku, Niigata 9518510, JapanNiigata Univ, Grad Sch Med & Dent Sci, Div Microscop Anat & Bioimaging, Chuo Ku, Niigata 9518510, Japan
机构:
Chinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R China
Univ Chinese Acad Sci, Beijing 100049, Peoples R ChinaChinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R China
Li Mi
Liu LianQing
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R ChinaChinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R China
Liu LianQing
Xi Ning
论文数: 0引用数: 0
h-index: 0
机构:
City Univ Hong Kong, Dept Mech & Biomed Engn, Hong Kong, Hong Kong, Peoples R ChinaChinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R China
Xi Ning
Wang YueChao
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R ChinaChinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R China
Wang YueChao
Dong ZaiLi
论文数: 0引用数: 0
h-index: 0
机构:
Chinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R ChinaChinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R China
Dong ZaiLi
Xiao XiuBin
论文数: 0引用数: 0
h-index: 0
机构:
Acad Mil Med Sci, Dept Lymphoma, Affiliated Hosp, Beijing 100071, Peoples R ChinaChinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R China
Xiao XiuBin
Zhang WeiJing
论文数: 0引用数: 0
h-index: 0
机构:
Acad Mil Med Sci, Dept Lymphoma, Affiliated Hosp, Beijing 100071, Peoples R ChinaChinese Acad Sci, Shenyang Inst Automat, State Key Lab Robot, Shenyang 110016, Peoples R China
机构:
State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences
University of Chinese Academy of SciencesState Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences
LI Mi
LIU LianQing
论文数: 0引用数: 0
h-index: 0
机构:
State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of SciencesState Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences
LIU LianQing
XI Ning
论文数: 0引用数: 0
h-index: 0
机构:
Department of Mechanical and Biomedical Engineering, City University of Hong KongState Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences
XI Ning
WANG YueChao
论文数: 0引用数: 0
h-index: 0
机构:
State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of SciencesState Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences
WANG YueChao
DONG ZaiLi
论文数: 0引用数: 0
h-index: 0
机构:
State Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of SciencesState Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences
DONG ZaiLi
XIAO XiuBin
论文数: 0引用数: 0
h-index: 0
机构:
Department of Lymphoma, Affiliated Hospital of Military Medical Academy of SciencesState Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences
XIAO XiuBin
ZHANG WeiJing
论文数: 0引用数: 0
h-index: 0
机构:
Department of Lymphoma, Affiliated Hospital of Military Medical Academy of SciencesState Key Laboratory of Robotics, Shenyang Institute of Automation, Chinese Academy of Sciences