GaN ultraviolet avalanche photodiodes with optical gain greater than 1000 grown on GaN substrates by metal-organic chemical vapor deposition

被引:102
|
作者
Limb, J. B.
Yoo, D.
Ryou, J. H.
Lee, W.
Shen, S. C.
Dupuis, R. D. [1 ]
Reed, M. L.
Collins, C. J.
Wraback, M.
Hanser, D.
Preble, E.
Williams, N. M.
Evans, K.
机构
[1] Georgia Inst Technol, Sch Elect & Comp Engn, Ctr Compound Semicond, Atlanta, GA 30332 USA
[2] USA, Res Lab, AMSRL SE EM, Adelphi, MD 20783 USA
[3] Kyma Technol Inc, Raleigh, NC 27617 USA
关键词
D O I
10.1063/1.2219390
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the performance of GaN p-i-n ultraviolet avalanche photodiodes grown on bulk GaN substrates by metal-organic chemical vapor deposition. The low dislocation density in the devices enables low reverse-bias dark currents prior to avalanche breakdown for similar to 30 mu m diameter mesa photodetectors. The photoresponse is relatively independent of the bias voltage prior to the onset of avalanche gain which occurs at an electric field of similar to 2.8 MV/cm. The magnitude of the reverse-bias breakdown voltage shows a positive temperature coefficient of similar to 0.05 V/K, confirming that the avalanche breakdown mechanism dominates. With ultraviolet illumination at lambda similar to 360 nm, devices with mesa diameters of similar to 50 mu m achieve stable maximum optical gains greater than 1000. To the best of our knowledge, this is the highest optical gain achieved for GaN-based avalanche photodiodes and the largest area III-N avalance photodetectors yet reported. (c) 2006 American Institute of Physics.
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