GaN ultraviolet avalanche photodiodes with optical gain greater than 1000 grown on GaN substrates by metal-organic chemical vapor deposition

被引:104
作者
Limb, J. B.
Yoo, D.
Ryou, J. H.
Lee, W.
Shen, S. C.
Dupuis, R. D. [1 ]
Reed, M. L.
Collins, C. J.
Wraback, M.
Hanser, D.
Preble, E.
Williams, N. M.
Evans, K.
机构
[1] Georgia Inst Technol, Sch Elect & Comp Engn, Ctr Compound Semicond, Atlanta, GA 30332 USA
[2] USA, Res Lab, AMSRL SE EM, Adelphi, MD 20783 USA
[3] Kyma Technol Inc, Raleigh, NC 27617 USA
关键词
D O I
10.1063/1.2219390
中图分类号
O59 [应用物理学];
学科分类号
摘要
We report the performance of GaN p-i-n ultraviolet avalanche photodiodes grown on bulk GaN substrates by metal-organic chemical vapor deposition. The low dislocation density in the devices enables low reverse-bias dark currents prior to avalanche breakdown for similar to 30 mu m diameter mesa photodetectors. The photoresponse is relatively independent of the bias voltage prior to the onset of avalanche gain which occurs at an electric field of similar to 2.8 MV/cm. The magnitude of the reverse-bias breakdown voltage shows a positive temperature coefficient of similar to 0.05 V/K, confirming that the avalanche breakdown mechanism dominates. With ultraviolet illumination at lambda similar to 360 nm, devices with mesa diameters of similar to 50 mu m achieve stable maximum optical gains greater than 1000. To the best of our knowledge, this is the highest optical gain achieved for GaN-based avalanche photodiodes and the largest area III-N avalance photodetectors yet reported. (c) 2006 American Institute of Physics.
引用
收藏
页数:3
相关论文
共 18 条
[1]  
BHATTACHARYA P, 1997, SEMICONDUCTOR OPTOEL, pCH8
[2]  
BURR K, 2002, MATER RES SOC S P, V742
[3]   Recent advances in avalanche photodiodes [J].
Campbell, JC ;
Demiguel, S ;
Ma, F ;
Beck, A ;
Guo, XY ;
Wang, SL ;
Zheng, XG ;
Li, XW ;
Beck, JD ;
Kinch, MA ;
Huntington, A ;
Coldren, LA ;
Decobert, J ;
Tscherptner, N .
IEEE JOURNAL OF SELECTED TOPICS IN QUANTUM ELECTRONICS, 2004, 10 (04) :777-787
[4]   GaN avalanche photodiodes [J].
Carrano, JC ;
Lambert, DJH ;
Eiting, CJ ;
Collins, CJ ;
Li, T ;
Wang, S ;
Yang, B ;
Beck, AL ;
Dupuis, RD ;
Campbell, JC .
APPLIED PHYSICS LETTERS, 2000, 76 (07) :924-926
[5]   Improved solar-blind detectivity using an AlxGa1-xN heterojunction p-i-n photodiode [J].
Collins, CJ ;
Chowdhury, U ;
Wong, MM ;
Yang, B ;
Beck, AL ;
Dupuis, RD ;
Campbell, JC .
APPLIED PHYSICS LETTERS, 2002, 80 (20) :3754-3756
[6]   Demonstration of ultraviolet separate absorption and multiplication 4H-SiC avalanche photodiodes [J].
Guo, XY ;
Rowland, LB ;
Dunne, GT ;
Fronheiser, JA ;
Sandvik, PM ;
Beck, AL ;
Campbell, JC .
IEEE PHOTONICS TECHNOLOGY LETTERS, 2006, 18 (1-4) :136-138
[7]   ULTRAHIGH SENSITIVITY SINGLE-PHOTON DETECTOR USING A SI AVALANCHE PHOTODIODE FOR THE MEASUREMENT OF ULTRAWEAK BIOCHEMILUMINESCENCE [J].
ISOSHIMA, T ;
ISOJIMA, Y ;
HAKOMORI, K ;
KIKUCHI, K ;
NAGAI, K ;
NAKAGAWA, H .
REVIEW OF SCIENTIFIC INSTRUMENTS, 1995, 66 (04) :2922-2926
[8]  
Lamarre P, 2001, PHYS STATUS SOLIDI A, V188, P289, DOI 10.1002/1521-396X(200111)188:1<289::AID-PSSA289>3.0.CO
[9]  
2-U
[10]   Effect of thermal annealing induced by p-type layer growth on blue and green LED performance [J].
Lee, W ;
Limb, J ;
Ryou, JH ;
Yoo, D ;
Chung, T ;
Dupuis, RD .
JOURNAL OF CRYSTAL GROWTH, 2006, 287 (02) :577-581