Local Electrode Atom Probes

被引：125
作者：
Kelly, TF
Larson, DJ
机构：
[1] Univ Wisconsin, Dept Mat Sci & Engn, Madison, WI 53706 USA
[2] Oak Ridge Natl Lab, Div Met & Ceram, Oak Ridge, TN 37831 USA
来源：
MATERIALS CHARACTERIZATION | 2000年 / 44卷 / 1-2期
基金：
美国国家科学基金会;
关键词：
D O I：
10.1016/S1044-5803(99)00055-8
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
The historical developments leading to the advent of Local Electrode Atom Probes (LEAP) are reviewed. An assessment of the state of the art is made, and the major advantages of LEAPs over conventional atom probes are described. The best implementations of these concepts and the remaining challenges for realization of LEAP's potential are also described. It is concluded that LEAPs should be an important tool for materials characterization at the atomic scale. Modern materials-dependent industries as diverse as steel and microelectronics should benefit from this technology. (C) Elsevier Science Inc., 2000. All rights reserved.
引用
收藏
页码：59 / 85
页数：27
相关论文
共 80 条
[1]   NEW SCANNING TUNNELING MICROSCOPY TIP FOR MEASURING SURFACE-TOPOGRAPHY [J].
AKAMA, Y ;
NISHIMURA, E ;
SAKAI, A ;
MURAKAMI, H .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1990, 8 (01) :429-433
[2]  
ALKASSAB T, 1995, APPL SURF SCI, V94, P306
[3]   ION INTERACTION WITH SOLIDS - SURFACE TEXTURING, SOME BULK EFFECTS, AND THEIR POSSIBLE APPLICATIONS [J].
AUCIELLO, O .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1981, 19 (04) :841-867
[4]  
AUCIELLO O, 1984, ION BOMBARDMENT MODI, P1
[5]   Electrostatic analysis of local-electrode atom probes [J].
Bajikar, SS ;
Kelly, TF ;
Camus, PP .
APPLIED SURFACE SCIENCE, 1996, 94-5 :464-471
[6]   Magnification and mass resolution in local-electrode atom probes [J].
Bajikar, SS ;
Larson, DJ ;
Kelly, TF ;
Camus, PP .
ULTRAMICROSCOPY, 1996, 65 (1-2) :119-129
[7]   MICROFABRICATION OF EXTRACTION OF EXTRACTION ELECTRODES FOR LOCAL-ELECTRODE ATOM PROBES [J].
BAJIKAR, SS ;
KELLY, TF ;
TENG, CM ;
CAMUS, PP .
APPLIED SURFACE SCIENCE, 1995, 87-8 (1-4) :438-445
[8]  
BAJIKAR SS, 1996, THESIS U WISCONSIN M
[9]  
BAJIKAR SS, 1996, J PHYS, V4, P303
[10]  
BRODIE I, 1992, ADV ELECTRON EL PHYS, V83, P1
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