Magnetic origami creates high performance micro devices

被引:59
作者
Gabler, Felix [1 ,2 ]
Karnaushenko, Dmitriy D. [1 ]
Karnaushenko, Daniil [1 ]
Schmidt, Oliver G. [1 ,2 ,3 ,4 ]
机构
[1] Leibniz IFW Dresden, Inst Integrat Nanosci, D-01069 Dresden, Germany
[2] TU Chemnitz, Mat Syst Nanoelect, D-09107 Chemnitz, Germany
[3] TU Chemnitz, Res Ctr Mat Architectures & Integrat Nanomembrane, D-09126 Chemnitz, Germany
[4] Tech Univ Dresden, Fac Phys, Nanophys, D-01062 Dresden, Germany
关键词
ENERGY; NANOMEMBRANES; GRAPHENE;
D O I
10.1038/s41467-019-10947-x
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Self-assembly of two-dimensional patterned nanomembranes into three-dimensional micro-architectures has been considered a powerful approach for parallel and scalable manufacturing of the next generation of micro-electronic devices. However, the formation pathway towards the final geometry into which two-dimensional nanomembranes can transform depends on many available degrees of freedom and is plagued by structural inaccuracies. Especially for high-aspect-ratio nanomembranes, the potential energy landscape gives way to a manifold of complex pathways towards misassembly. Therefore, the self-assembly yield and device quality remain low and cannot compete with state-of-the art technologies. Here we present an alternative approach for the assembly of high-aspect-ratio nanomembranes into microelectronic devices with unprecedented control by remotely programming their assembly behavior under the influence of external magnetic fields. This form of magnetic Origami creates micro energy storage devices with excellent performance and high yield unleashing the full potential of magnetic field assisted assembly for on-chip manufacturing processes.
引用
收藏
页数:10
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