Low-Loss Planar Optical Waveguides Fabricated From Polycarbonate

被引:17
|
作者
Chen, Jian-guo [1 ]
Zhang, Tong [1 ]
Zhu, Jin-song [2 ]
Zhang, Xiao-yang [1 ]
Zhou, Jing-lun [2 ]
Fan, Jiang-feng [2 ]
Hu, Guo-hua [1 ]
机构
[1] Southeast Univ, Sch Elect Sci & Engn, Nanjing 210096, Peoples R China
[2] NCNST, Beijing 100080, Peoples R China
来源
POLYMER ENGINEERING AND SCIENCE | 2009年 / 49卷 / 10期
关键词
FLUORINATED POLYIMIDE;
D O I
10.1002/pen.21441
中图分类号
TQ [化学工业];
学科分类号
0817 ;
摘要
Low-loss slab waveguides with air as overcladding based on a high glass transition temperature (T-g) polycarbonate were fabricated through spin-coating. Optical absorption and thermo-optic coefficient were investigated by spectrum analysis and prism coupler, respectively. Prism-coupling and charge-coupled device (CCD) camera imaging method were exploited together to evaluate the overall propagation loss of slab waveguides. The measured results of prism coupler were 0.282 dB/cm at 1310 nm and 0.197 dB/cm at 632.8 nm, whereas 0.07 dB/cm at 632.8 nm using CCD camera imaging method. Based on the same material, straight ridge waveguides and multimode interference couplers were fabricated through photolithograph and reactive ion etching, revealing smooth sides and excellent definition. POLYM. ENG. SCI, 49:2015-2019, 2009. (C) 2009 Society of Plastics Engineers
引用
收藏
页码:2015 / 2019
页数:5
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