Determination of optical constants of thin films from transmittance trace

被引：54

作者：

Bhattacharyya, S. R. ^{[1
]}

Gayen, R. N. ^{[1
]}

Paul, R. ^{[1
]}

Pal, A. K. ^{[1
]}

机构：

[1] Jadavpur Univ, Dept Instrumentat Sci, Kolkata 700032, W Bengal, India

来源：

THIN SOLID FILMS | 2009年 / 517卷 / 18期

关键词：

Optical constants; Transmittance; AMORPHOUS-SILICON; REFRACTIVE-INDEX; ALLOY-FILMS; ZNO FILMS; SUBSTRATE; THICKNESS; GROWTH; SEMICONDUCTORS; BANDGAP; GAP;

D O I：

10.1016/j.tsf.2009.03.168

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A simple method is depicted in this communication to determine the optical constants of transparent thin films from transmittance versus wavelength traces, showing no fringes, for evaluating thickness. The strength of this technique is apparent when applied to Zn1-xMgxO films. (C) 2009 Elsevier B.V. All rights reserved.

引用

页码：5530 / 5536

页数：7

共 30 条

[11] Molecular beam epitaxial growth of wide bandgap ZnMgO alloy films on (111)-oriented Si substrate toward UV-detector applications
Koike, K
Hama, K
Nakashima, I
Takada, G
Ogata, K
Sasa, S
Inoue, M
Yano, M
[J]. JOURNAL OF CRYSTAL GROWTH, 2005, 278 (1-4) : 288 - 292
[12] Determination of the thickness and optical constants of thin films from transmission spectra (vol 286, pg VI, 1996)
Kubinyi, M
Benko, N
Grofcsik, A
Jones, WJ
[J]. THIN SOLID FILMS, 1997, 292 (1-2) : 333 - 333
[13] Structural and optical properties of magnetron sputtered MgxZn1-xO thin films
Kumar, Sanjeev
Gupte, Vinay
Sreenivas, K.
[J]. JOURNAL OF PHYSICS-CONDENSED MATTER, 2006, 18 (13) : 3343 - 3354
[14] Extraction of optical constants of zinc oxide thin films by ellipsometry with various models
Liu, YC
Hsieh, JH
Tung, SK
[J]. THIN SOLID FILMS, 2006, 510 (1-2) : 32 - 38
[15] LYDEN HA, 1964, PHYS REV, V134, P1106
[16] OPTICAL AND ELECTRICAL-PROPERTIES OF SNO2 THIN-FILMS IN RELATION TO THEIR STOICHIOMETRIC DEVIATION AND THEIR CRYSTALLINE-STRUCTURE
MANIFACIER, JC
DEMURCIA, M
FILLARD, JP
VICARIO, E
[J]. THIN SOLID FILMS, 1977, 41 (02) : 127 - 135
[17] SIMPLE METHOD FOR DETERMINATION OF OPTICAL-CONSTANTS N,K AND THICKNESS OF A WEAKLY ABSORBING THIN-FILM
MANIFACIER, JC
GASIOT, J
FILLARD, JP
[J]. JOURNAL OF PHYSICS E-SCIENTIFIC INSTRUMENTS, 1976, 9 (11): : 1002 - 1004
[18] DETERMINATION OF OPTICAL CONSTANTS FROM INTENSITY MEASUREMENTS AT NORMAL INCIDENCE
NILSSON, PO
[J]. APPLIED OPTICS, 1968, 7 (03): : 435 - &
[19] DETERMINATION OF OPTICAL-CONSTANTS AND AVERAGE THICKNESS OF INHOMOGENEOUS-ROUGH THIN-FILMS USING SPECTRAL DEPENDENCE OF OPTICAL TRANSMITTANCE
NOWAK, M
[J]. THIN SOLID FILMS, 1995, 254 (1-2) : 200 - 210
[20] Structural and optical properties of ZnMgO nanostructures formed by Mg in-diffused ZnO nanowires
Pan, Ching-Ju
Hsu, Hsu-Cheng
Cheng, Hsin-Ming
Wu, Chun-Yi
Hsieh, Wen-Feng
[J]. JOURNAL OF SOLID STATE CHEMISTRY, 2007, 180 (04) : 1188 - 1192

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