Deterministic shape control in plasma-aided nanotip assembly

被引:54
作者
Tam, E. [1 ]
Levchenko, I. [1 ]
Ostrikov, K. [1 ]
机构
[1] Univ Sydney, Sch Phys, Sydney, NSW 2006, Australia
关键词
D O I
10.1063/1.2219378
中图分类号
O59 [应用物理学];
学科分类号
摘要
The possibility of deterministic plasma-assisted reshaping of capped cylindrical seed nanotips by manipulating the plasma parameter-dependent sheath width is shown. Multiscale hybrid gas phase/solid surface numerical experiments reveal that under the wide-sheath conditions the nanotips widen at the base and when the sheath is narrow, they sharpen up. By combining the wide- and narrow-sheath stages in a single process, it turns out possible to synthesize wide- base nanotips with long-and narrow-apex spikes, ideal for electron microemitter applications. This plasma-based approach is generic and can be applied to a larger number of multipurpose nanoassemblies. (c) 2006 American Institute of Physics.
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页数:3
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