Uncooled infrared imaging using bimaterial microcantilever arrays

We report on fabrication and characterization of arrays of bimaterial microcantilevers and discuss their performance as uncooled infrared imagers. An optical readout was used to simultaneously measure deflections of all microcantilevers in the array. The fabricated arrays had an average noise equivalent temperature difference (NETD) and a response time of 1.5 K and 6 ms, respectively. Some microcantilevers in the array exhibited NETD values below 500 mK, approaching our theoretical prediction of 151 mK. A unique and valuable feature of the implemented approach is its straightforward scalability to higher resolution arrays, without progressively growing complexity and cost. (c) 2006 American Institute of Physics.